Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
MICROMECHANICAL STRUCTURE, MICROMECHANICAL SYSTEM AND METHOD FOR PROVIDING A MICROMECHANICAL STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2020/173919
Kind Code:
A3
Abstract:
A micromechanical device comprises a substrate, a movable element (14), which is arranged in a reference plane in an undeflected state, a gearing structure having a first gearing side (22a), which is coupled to the substrate, and having a second gearing side (22b), which is coupled to the movable element, and an actuator (26) configured to provide a force along a force direction parallel to the reference plane and to apply it to the first gearing side. The gearing structure is configured to convert the force along the force direction into a movement of the movable element out of the reference plane.

More Like This:
WO/2014/144362DISPLAY DEVICE
JP2006099071IMAGE PROJECTING APPARATUS
JP7069640Movable devices, head-up displays, laser headlamps, head-mounted displays, vehicles and optical scanning methods
Inventors:
DRABE CHRISTIAN (DE)
DREYHAUPT ANDRÉ (DE)
Application Number:
PCT/EP2020/054863
Publication Date:
October 22, 2020
Filing Date:
February 25, 2020
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
FRAUNHOFER GES FORSCHUNG (DE)
International Classes:
G02B26/08
Domestic Patent References:
WO2001096930A12001-12-20
Foreign References:
US20060220492A12006-10-05
US20120119614A12012-05-17
US20050174624A12005-08-11
JP2006167860A2006-06-29
US20090201095A12009-08-13
EP1123526A12001-08-16
US20080074718A12008-03-27
Attorney, Agent or Firm:
KÖNIG, Andreas et al. (DE)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: CIRCUIT FOR REDUCED CHARGE-INJECTION ERRORS

Next Patent: CORRELATION OF MULTI PATH LEGS USING MULTI PATH CLIENT KEY CONFIGURATION