Title:
MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/030146
Kind Code:
A1
Abstract:
A micromirror device of the present invention has a first support part (21) that is connected to a mirror part (20) on a first axis (a1) in a plane including a reflective surface of the mirror part (20) during stopping and swingably supports the mirror part (20) around the first axis (a1). The first support part (21) includes a main shaft (21A) extending along the first axis (a1) and a plurality of sub-shafts (60A, 60B, 60C) that are symmetrically arranged on both sides of the main shaft (21A) with the first axis (a1) therebetween and extend along the first axis (a1), the first support part (21) has a folded structure having three or more folded portions (61, 62, 63) formed by connecting the plurality of sub-shafts (60A, 60B, 60C), and when the radii of curvature inside the folded portions (61, 62, 63) are defined as R1, R2, R3... in order from a side closest to the first axis (a1), the relationship 0.73≤Rk+1/Rk≤0.9 (k= 1, 2,…) is satisfied.
Inventors:
AOSHIMA KEISUKE (JP)
Application Number:
PCT/JP2021/024536
Publication Date:
February 10, 2022
Filing Date:
June 29, 2021
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
G02B26/10; B81B3/00
Domestic Patent References:
| WO2013168385A1 | 2013-11-14 | |||
| WO2011161943A1 | 2011-12-29 |
Foreign References:
| US20180180873A1 | 2018-06-28 | |||
| JP2017132281A | 2017-08-03 | |||
| JP2016206235A | 2016-12-08 |
Other References:
See also references of EP 4194926A4
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
Download PDF: