Title:
MICROOPTOELECTROMECHANICAL SYSTEM (MOEMS) BASED LASER
Document Type and Number:
WIPO Patent Application WO2002091529
Kind Code:
A3
Abstract:
A laser device includes a waveguide substrate having a plurality of folded waveguide paths, the folded waveguide paths having widths of no more than approximately 1 mm, the folded waveguide paths having a surface area to volume ratio of at least 4 mm<-1>. The laser can also include a re-entrant cavity adapted for surrounding the sides and bottom of the waveguide substrate and a plate layer having an electrode array formed from a plurality of conductive traces aligned with the waveguide paths. A method for forming a laser device includes the steps of providing a waveguide substrate and forming a folded waveguide structure from a plurality of intersecting folded waveguide paths in the waveguide substrate, the folded waveguide paths having widths of no more than 1 mm, the waveguide paths having a surface area to volume ratio of at least 4 mm<-1>.
More Like This:
Inventors:
HUTCHINSON DONALD P
Application Number:
PCT/US2002/011240
Publication Date:
November 06, 2003
Filing Date:
April 09, 2002
Export Citation:
Assignee:
UT BATTELLE LLC (US)
International Classes:
H01S3/063; H01S3/081; H01S3/23; (IPC1-7): H01S3/063; H01S3/081; H01S3/07; H01S3/03
Foreign References:
| US4870654A | 1989-09-26 | |||
| US5610936A | 1997-03-11 | |||
| US4087764A | 1978-05-02 |
Download PDF: