Title:
MIRROR DRIVING DEVICE AND DRIVING METHOD FOR SAME
Document Type and Number:
WIPO Patent Application WO/2014/050586
Kind Code:
A1
Abstract:
Provided is a mirror driving device. In the present invention, a pair of piezoelectric actuator parts are disposed on both sides of a mirror part interposed therebetween, and the piezoelectric actuator parts are connected via a linking part in an end part of a mirror part. The linking part has a structure including one or more plate-shaped members having the direction perpendicular to rotating shaft as the longitudinal direction thereof, and by the driving of the piezoelectric actuator parts, the plate-shaped members flexurally deform in the thickness direction and function as plate-shaped hinge parts. The linking part is provided with a sensor part for detecting stress that occurs in the linking part during rotational driving of the mirror part by resonant oscillation.
Inventors:
NAONO TAKAYUKI (JP)
Application Number:
PCT/JP2013/074648
Publication Date:
April 03, 2014
Filing Date:
September 12, 2013
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
G02B26/10; B81B3/00; G02B26/08; H01L41/09; H01L41/187; H01L41/22; H01L41/316
Foreign References:
| JP2011095523A | 2011-05-12 | |||
| JP2009258210A | 2009-11-05 | |||
| JP2011150055A | 2011-08-04 | |||
| JP2008040240A | 2008-02-21 |
Other References:
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 15, no. 4, August 2006 (2006-08-01)
T. ISEKI, IEEJ TRANS. ELEC. ELECTRON. ENG., vol. 5, 2010, pages 361 - 368
KOH, OPTICS EXPRESS, vol. 19, no. 15, 2011, pages 13812
See also references of EP 2902836A4
T. ISEKI, IEEJ TRANS. ELEC. ELECTRON. ENG., vol. 5, 2010, pages 361 - 368
KOH, OPTICS EXPRESS, vol. 19, no. 15, 2011, pages 13812
See also references of EP 2902836A4
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
Kenzo Matsuura (JP)
Kenzo Matsuura (JP)
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