Title:
MOLD RELEASE PERFORMANCE-RESTORING SOLUTION, MOLD RELEASE PERFORMANCE RESTORATION METHOD, AND PHOTOMASK
Document Type and Number:
WIPO Patent Application WO/2014/171315
Kind Code:
A1
Abstract:
Provided is a mold release performance-restoring solution useful for restoring decreased mold release performance when the mold release performance of a coating film containing silicone oil has decreased. The solution is configured of only a performance-restoring component and a solvent, and the performance-restoring component is configured of reactive silicone oil and non-reactive silicone oil. The reactive silicone oil is preferably contained in a quantity of 3-5 parts by weight per part by weight of non-reactive silicone oil. The weight ratio of the performance-restoring component and the solvent is preferably set at 4:96-6:94.
Inventors:
NEGISHI TOMOKO (JP)
NAKAMURA KAORU (JP)
KURISHIMA SUSUMU (JP)
HIRAMATSU HIROSHI (JP)
NAKAMURA KAORU (JP)
KURISHIMA SUSUMU (JP)
HIRAMATSU HIROSHI (JP)
Application Number:
PCT/JP2014/059427
Publication Date:
October 23, 2014
Filing Date:
March 31, 2014
Export Citation:
Assignee:
KIMOTO KK (JP)
International Classes:
C09K3/00; C08L83/04; G03F1/48
Domestic Patent References:
WO2011064859A1 | 2011-06-03 |
Foreign References:
JPS5821491A | 1983-02-08 | |||
JP2008106161A | 2008-05-08 | |||
JP2007500775A | 2007-01-18 | |||
JP2003231142A | 2003-08-19 | |||
JP2013082150A | 2013-05-09 |
Attorney, Agent or Firm:
OHKURA, Koichiro (JP)
Koichiro Okura (JP)
Koichiro Okura (JP)
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