Title:
MOLECULAR BEAM EVAPORATION SOURCE (EFFUSION CELL) FOR VACUUM THIN-FILM DEPOSITION
Document Type and Number:
WIPO Patent Application WO/2022/158631
Kind Code:
A1
Abstract:
A molecular beam evaporation source (effusion cell) for vacuum thin-film deposition is disclosed. The effusion cell for vacuum thin-film deposition according to the present invention comprises: a crucible in which an evaporable material is held and which has a hollow-shaped support; and a heating wire which is installed to be inserted into the support and generates heat for evaporating the evaporable material held in the crucible, wherein the support comprises a plurality of support parts along the circumference of the crucible, and the heating wire is inserted into at least one of the support parts.
Inventors:
PARK EUN JUNG (KR)
CHO SUNG LAE (KR)
PARK EUN JI (KR)
CHO SUNG LAE (KR)
PARK EUN JI (KR)
Application Number:
PCT/KR2021/001251
Publication Date:
July 28, 2022
Filing Date:
January 29, 2021
Export Citation:
Assignee:
UNIV ULSAN FOUND IND COOP (KR)
PARK EUN JUNG (KR)
PARK EUN JUNG (KR)
International Classes:
C23C14/24; C23C14/26; C23C14/54; C30B23/06
Foreign References:
| KR20200021311A | 2020-02-28 | |||
| JP2007231368A | 2007-09-13 | |||
| US20080280066A1 | 2008-11-13 | |||
| JP2006111961A | 2006-04-27 | |||
| KR20160007262A | 2016-01-20 |
Attorney, Agent or Firm:
DANA PATENT LAW FIRM (KR)
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