Title:
MOUNTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/213567
Kind Code:
A1
Abstract:
A mounting device 1 is equipped with: two direct-acting voice coil motors 38 in which a movable element 38c reciprocally moves along an axis A relative to a fixed element 38b; and a collet 34A mounted on an end part side of the movable elements 38c, the collet 34A holding a semiconductor chip 101 by suction. The plurality of voice coil motors 38 are disposed so as to be set away from each other along a direction intersecting the axes A, and so that the axes A are parallel to each other. The collet 34A is mounted so as to straddle chucks 39 provided at the end parts of the two movable elements 38c.
Inventors:
SEYAMA KOHEI (JP)
UTANO TETSUYA (JP)
UTANO TETSUYA (JP)
Application Number:
PCT/JP2020/016294
Publication Date:
October 22, 2020
Filing Date:
April 13, 2020
Export Citation:
Assignee:
SHINKAWA KK (JP)
International Classes:
H01L21/52; H01L21/60; H01L21/67; H05K13/04
Foreign References:
| JPH09283990A | 1997-10-31 | |||
| JPH11297764A | 1999-10-29 | |||
| JP2017041532A | 2017-02-23 | |||
| JP2007200914A | 2007-08-09 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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