MULTI-LAYER PHOTO DEFINABLE GLASS WITH INTEGRATED DEVICES

Title:

MULTI-LAYER PHOTO DEFINABLE GLASS WITH INTEGRATED DEVICES

Document Type and Number:

WIPO Patent Application WO/2017/132280

Kind Code:

A3

Abstract:

The invention relates to eliminating or dramatically reducing the mechanical distortion induced in photo-definable glass as a function of temperature and time processing during metallization that enable multi-layer and single layer photo-definable structures, that can contain electronic, photonic, or MEMS devices to create unique vertically integrated device or system level structures.

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Inventors:

FLEMMING JEB H (US)
BULLINGTON JEFF (US)

Application Number:

PCT/US2017/014977

Publication Date:

February 01, 2018

Filing Date:

January 25, 2017

Export Citation:

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Assignee:

3D GLASS SOLUTIONS INC (US)

International Classes:

C03C4/04

Domestic Patent References:

WO2011109648A1

2011-09-09

Foreign References:

US20110217657A1	2011-09-08
US5409741A	1995-04-25
US4537612A	1985-08-27

Other References:

DIETRICH, T.R. ET AL.: "Fabrication technologies for microsystems utilizing photoetchable glass", MICROELECTRONIC ENGINEERING 30, 1996, pages 497 - 504, XP055083358

Attorney, Agent or Firm:

CHALKER, Daniel, J. et al. (US)

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