Title:
NANO-FLUID DEVICE AND CHEMICAL ANALYSIS APPARATUS
Document Type and Number:
WIPO Patent Application WO/2017/069256
Kind Code:
A1
Abstract:
This nano-fluid device is provided with a first substrate having a nanoscale groove in one surface thereof, and a second substrate for forming a nano-flow channel with the groove of the first substrate, the second substrate being provided integrally with the first substrate so that faces thereof are joined together, wherein either the first substrate or the second substrate is provided at least with a thin-walled part in a portion at a position overlapping with the nano-flow channel in plan view, and the thin-walled part deforms by pressure thereon and opens and closes the nano-flow channel.
Inventors:
KAZOE YUTAKA (JP)
PIHOSH YURIY (JP)
KITAMORI TAKEHIKO (JP)
PIHOSH YURIY (JP)
KITAMORI TAKEHIKO (JP)
Application Number:
PCT/JP2016/081315
Publication Date:
April 27, 2017
Filing Date:
October 21, 2016
Export Citation:
Assignee:
JAPAN SCIENCE & TECH AGENCY (JP)
International Classes:
G01N35/08; B81B1/00; G01N37/00
Domestic Patent References:
| WO2011067961A1 | 2011-06-09 |
Foreign References:
| JP2014240065A | 2014-12-25 | |||
| JP2011047708A | 2011-03-10 | |||
| JP2009168216A | 2009-07-30 | |||
| JP2011524815A | 2011-09-08 |
Other References:
See also references of EP 3367105A4
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Download PDF: