Title:
NARROW-BAND LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/047871
Kind Code:
A1
Abstract:
A narrow-band laser apparatus according to the present invention comprises: a laser resonator that includes an output coupling mirror and a narrow-band module, the narrow-band module including a prism and a grating, a reflecting surface of the grating being concave; a laser chamber that is disposed in an optical path of the laser resonator, the laser chamber including a pair of discharge electrodes; an electric power supply that applies a high-voltage pulse to the discharge electrodes, the repetition frequency of the high-voltage pulse being variable; a wavefront regulator that includes an output coupling mirror; a spectrum detector for measuring a spectral line width of pulsed laser radiation that is outputted from the output coupling mirror; and a processor that controls the wavefront regulator on the basis of the measured spectral line width.
Inventors:
HATTORI MASAKAZU (JP)
Application Number:
PCT/JP2022/033143
Publication Date:
March 07, 2024
Filing Date:
September 02, 2022
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/105; G03F7/20; H01S3/0943; H01S3/10
Domestic Patent References:
| WO2022085146A1 | 2022-04-28 |
Foreign References:
| JP2008016544A | 2008-01-24 | |||
| JPH1126856A | 1999-01-29 | |||
| JPH0427182A | 1992-01-30 | |||
| JPH11274632A | 1999-10-08 | |||
| US5095492A | 1992-03-10 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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