Title:
NITRIDE SEMICONDUCTOR STRUCTURE, LAMINATE STRUCTURE, AND NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT
Document Type and Number:
WIPO Patent Application WO/2014/054284
Kind Code:
A1
Abstract:
A nitride semiconductor structure having an m surface as a primary surface, wherein the structure is provided with a plurality of crystal-growth seed regions (130) comprising a nitride semiconductor extending at an angle in a range of 0-10° in relation to an a-axis, and a horizontal-direction growth region (320b) comprising a nitride semiconductor spread in the c-axis direction from each of the plurality of crystal-growth seed regions, the interval (S width) between adjacent crystal-growth seed regions being at least 20 µm.
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Inventors:
CHOE SONGBAEK
YOSHIDA SHUNJI
YOKOGAWA TOSHIYA
YOSHIDA SHUNJI
YOKOGAWA TOSHIYA
Application Number:
PCT/JP2013/005887
Publication Date:
April 10, 2014
Filing Date:
October 02, 2013
Export Citation:
Assignee:
PANASONIC CORP (JP)
International Classes:
H01L21/205; C23C16/34; C30B25/02; C30B29/38; H01L21/02; H01L21/20
Domestic Patent References:
WO2011083551A1 | 2011-07-14 | |||
WO2010029720A1 | 2010-03-18 |
Foreign References:
JP2007184503A | 2007-07-19 | |||
JP2010512301A | 2010-04-22 |
Other References:
A. HIRAI ET AL.: "Formation and reduction of pyramidal hillocks on m-plane {1-100} GaN", APPLIED PHYSICS LETTERS, vol. 91, no. 19, 8 November 2007 (2007-11-08), pages 191906-1 - 191906-3
Attorney, Agent or Firm:
OKUDA, SEIJI (JP)
Seiji Okuda (JP)
Seiji Okuda (JP)
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