Title:
NON-CONTACT TEMPERATURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2015/129176
Kind Code:
A1
Abstract:
The present invention is provided with: an insulating film (2); a thin-film thermistor unit (3) formed on the surface of the insulating film; a pair of interdigitated electrodes formed atop the thin-film thermistor unit; a pair of pad electrodes (5) formed on the surface of the insulating film; a pair of patterned wiring portions (6) having one end connected to the pair of interdigitated electrodes and the other end connected to the pair of pad electrodes; and a pair of lead frames (7) that are adhered to the pair of pad electrodes on the insulating film surface side. The thin-film thermistor unit is formed in a thermistor formation region (2a) that is disposed on the leading-end side of the insulating film, the pad electrodes are formed in an electrode formation region (2b) that is disposed on the base-end side of the insulating film, and the leading-end side of the pair of lead frames surrounds the periphery of the thermistor formation region without being in contact therewith.
Inventors:
NAKAMURA KENZO (JP)
NISHIYAMA MASASHI (JP)
MATSUMOTO FUMIO (JP)
NISHIYAMA MASASHI (JP)
MATSUMOTO FUMIO (JP)
Application Number:
PCT/JP2015/000598
Publication Date:
September 03, 2015
Filing Date:
February 10, 2015
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORP (JP)
International Classes:
G01J5/02; G01J5/20
Foreign References:
| JPH0569643U | 1993-09-21 | |||
| JPH08148727A | 1996-06-07 | |||
| JP2013210303A | 2013-10-10 | |||
| JPH08110268A | 1996-04-30 | |||
| JPH07286911A | 1995-10-31 | |||
| JP2005214641A | 2005-08-11 | |||
| JP2008058370A | 2008-03-13 |
Other References:
See also references of EP 3112829A4
Attorney, Agent or Firm:
TAKAOKA, Ryoichi (JP)
Ryoichi Takaoka (JP)
Ryoichi Takaoka (JP)
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