Title:
NOVEL TUNGSTEN-BASED THERMAL-SPRAYED COATING AND THERMAL-SPRAYING MATERIAL FOR OBTAINING THE SAME
Document Type and Number:
WIPO Patent Application WO/2021/177393
Kind Code:
A1
Abstract:
Provided are: a novel tungsten-based thermal-sprayed coating suitable as a member for a plasma etching device that uses a halogen gas; and a thermal-spraying material for obtaining the thermal-sprayed coating. The thermal-sprayed coating is characterized by containing tungsten as a matrix phase and containing an oxide including silicon and boron as a dispersed phase. The plasma etching device member has this thermal-sprayed coating. The thermal-spraying material is characterized by including 1 to 7 wt% of silicon, 0.5 to 3 wt% of boron, and tungsten and unavoidable impurities as the balance. A method for producing the thermal-sprayed coating includes spraying the thermal-spraying material.
Inventors:
HAMASHIMA KAZUO (JP)
MORISASA MASASHI (JP)
ANAI SHINSUKE (JP)
MORISASA MASASHI (JP)
ANAI SHINSUKE (JP)
Application Number:
PCT/JP2021/008344
Publication Date:
September 10, 2021
Filing Date:
March 04, 2021
Export Citation:
Assignee:
TOCALO CO LTD (JP)
International Classes:
C23C4/06; C23C4/10; C23C4/11; H01L21/3065
Foreign References:
| JPH04235249A | 1992-08-24 | |||
| JP2018059174A | 2018-04-12 | |||
| JP2001226773A | 2001-08-21 | |||
| US20140113453A1 | 2014-04-24 |
Other References:
KOBAYASHI, AKIRA: "Tungsten Coating for Thermal fusion Material Produced by Gas Tunnel Type Plasma Spraying", TRANSACTIONS OF JWRI, vol. 37, no. 1, 11 July 2008 (2008-07-11), pages 63 - 67, XP055852097
Attorney, Agent or Firm:
T.S. PARTNERS et al. (JP)
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