Title:
OBJECT-SWAPPING METHOD, OBJECT-SWAPPING SYSTEM, EXPOSURE APPARATUS, METHOD FOR MANUFACTURING FLAT-PANEL DISPLAY, AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/024483
Kind Code:
A1
Abstract:
This object-swapping method, whereby a substrate (P1) on a substrate stage apparatus (20) is swapped out for another substrate (P2), includes the following: positioning the substrate stage apparatus (20), which is holding the first substrate (P1), in a prescribed object-swapping position; having a suspension support apparatus (50) provided at said object-swapping position support the first substrate (P1) in a suspended manner; separating the first substrate (P1), supported in a suspended manner by the suspension support apparatus (50), from the substrate stage apparatus (20); inserting the second substrate (P2) between the substrate stage apparatus (20) and the first substrate (P1) supported in a suspended manner by the suspension support apparatus (50) and transferring the second substrate (P2) to the substrate stage apparatus (20); and moving the first substrate (P1) away from the object-swapping position by moving said first substrate (P1) relative to the suspension support apparatus (50).
Inventors:
AOKI YASUO (JP)
Application Number:
PCT/JP2013/004763
Publication Date:
February 13, 2014
Filing Date:
August 07, 2013
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F7/20; B65G49/06; H01L21/027; H01L21/677
Foreign References:
| JP2008300723A | 2008-12-11 | |||
| JP2002368065A | 2002-12-20 | |||
| JP2005044882A | 2005-02-17 | |||
| JP2011053586A | 2011-03-17 | |||
| JP2012060134A | 2012-03-22 | |||
| JP2012060118A | 2012-03-22 |
Attorney, Agent or Firm:
TATEISHI, Atsuji (JP)
Tokuji Tateishi (JP)
Tokuji Tateishi (JP)
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