Title:
OPTICAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/009396
Kind Code:
A1
Abstract:
This optical device is provided with: a base having a main surface; a movable section comprising an optical function section; an elastic support section for supporting the movable section such that the movable section is capable of moving along a predetermined direction perpendicular to the main surface; a fixed comb electrode comprising a plurality of fixed comb teeth; and a movable comb electrode having a plurality of movable comb teeth arranged in an alternating manner with the plurality of fixed comb teeth. At least one of the movable section and the elastic support section comprises an electrode support section for supporting the movable comb electrode. The electrode support section comprises a beam section formed so that the thickness of the electrode support section in a predetermined direction is thicker than the thickness of the movable comb teeth in the predetermined direction.
Inventors:
SUGIMOTO TATSUYA (JP)
SUZUKI TOMOFUMI (JP)
KOTANI KYOSUKE (JP)
SUZUKI TOMOFUMI (JP)
KOTANI KYOSUKE (JP)
Application Number:
PCT/JP2018/025638
Publication Date:
January 10, 2019
Filing Date:
July 06, 2018
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B26/00; B81B3/00; G01J3/45
Foreign References:
| JP2007155965A | 2007-06-21 | |||
| JP2010184334A | 2010-08-26 | |||
| JP2014023207A | 2014-02-03 | |||
| JP2013009447A | 2013-01-10 | |||
| JP2015102483A | 2015-06-04 | |||
| US6507138B1 | 2003-01-14 | |||
| US20080284078A1 | 2008-11-20 |
Other References:
See also references of EP 3650918A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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