Title:
OPTICAL FILM THICKNESS METER AND THIN FILM FORMING APPARATUS PROVIDED WITH OPTICAL FILM THICKNESS METER
Document Type and Number:
WIPO Patent Application WO/2011/001968
Kind Code:
A1
Abstract:
Disclosed is an optical film thickness meter which can measure optical film thicknesses and spectroscopic characteristics with a high accuracy. A thin film forming apparatus provided with the optical film thickness meter is also disclosed. The optical film thickness meter is composed of a projector (11), a reflection mirror (17), a light receiver (19), and a spectroscope (20). The reflection mirror (17), which has the reflecting surface thereof disposed substantially perpendicular to the optical axis of measuring light, is provided on the side of an actual substrate (S), said side being the reverse side of the actual substrate side having the measuring light applied thereto. Furthermore, the actual substrate (S) is disposed at a predetermined tilt angle (α) with respect to the optical axis of the measuring light. The measuring light (outgoing light and reflecting light) passes through the actual substrate (S) twice, and the change quantity of the transmissivity (light quantity) is increased, and the control accuracy of film thickness measurement is improved. Furthermore, since generation of measurement errors due to different light transmitting positions can be eliminated and the measuring light that has not passed through the substrate twice via a predetermined path is prevented from being detected on the side of the light receiver (19), the optical film thicknesses and the spectroscopic characteristics can be measured with a high accuracy.
Inventors:
SAI KYOKUYO (JP)
HINATA YOHEI (JP)
OTAKI YOSHIYUKI (JP)
JIANG YOUSONG (JP)
HINATA YOHEI (JP)
OTAKI YOSHIYUKI (JP)
JIANG YOUSONG (JP)
Application Number:
PCT/JP2010/061041
Publication Date:
January 06, 2011
Filing Date:
June 29, 2010
Export Citation:
Assignee:
SHINCRON CO LTD (JP)
SAI KYOKUYO (JP)
HINATA YOHEI (JP)
OTAKI YOSHIYUKI (JP)
JIANG YOUSONG (JP)
SAI KYOKUYO (JP)
HINATA YOHEI (JP)
OTAKI YOSHIYUKI (JP)
JIANG YOUSONG (JP)
International Classes:
G01B11/06; C23C14/54
Foreign References:
| JPS5491263A | 1979-07-19 | |||
| JP2004219108A | 2004-08-05 | |||
| JP2005301032A | 2005-10-27 | |||
| JP2006330485A | 2006-12-07 | |||
| JPS5644802A | 1981-04-24 | |||
| JP2003121119A | 2003-04-23 | |||
| JP2007199084A | 2007-08-09 |
Attorney, Agent or Firm:
AKIYAMA, Atsushi et al. (JP)
Akiyama 敦 (JP)
Akiyama 敦 (JP)
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