Title:
OPTICAL INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/087653
Kind Code:
A1
Abstract:
An optical inspection device (1) is provided with a light irradiation unit (11) for irradiating light onto an article (50), a light detection unit (12) for detecting light that has been irradiated on and transmitted through the article (50), and a support part (13) for supporting, in a cantilever manner, the light irradiation unit (11) and the light detection unit (12). The optical inspection area for the article (50) is exposed to the ambient atmosphere.
Inventors:
OKAMOTO TSUTOMU (JP)
MIZUNO EMI (JP)
TARUMOTO YOSHINORI (JP)
MIZUNO EMI (JP)
TARUMOTO YOSHINORI (JP)
Application Number:
PCT/JP2014/079865
Publication Date:
June 18, 2015
Filing Date:
November 11, 2014
Export Citation:
Assignee:
ISHIDA SEISAKUSHO (JP)
International Classes:
G01N21/89; G01N21/90
Foreign References:
| JP2004157027A | 2004-06-03 | |||
| JP2008076218A | 2008-04-03 | |||
| JP2003197699A | 2003-07-11 | |||
| JP2012189563A | 2012-10-04 | |||
| JP2012189563A | 2012-10-04 |
Other References:
See also references of EP 3081925A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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