Title:
OPTICAL MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/238654
Kind Code:
A1
Abstract:
Provided is an optical measurement device that can protect a light receiver. A light source device 200 generates wavelength-swept light L1. An irradiation optical system 310 irradiates a measurement position 4 with the wavelength-swept light L1. A conveyance device 330 conveys a sample 2 so as to pass through the measurement position 4. A light receiving device 320 measures object light L2, which is wavelength-swept light that has passed through the sample 2. An optical path switching element 340 is provided to the optical path of the wavelength-swept light L1 and switches the optical path of the wavelength-swept light. A controller 350 controls the optical path switching element 340 in accordance with the presence or absence of a measurement target 2.
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Inventors:
YOKOYAMA TAKUMA (JP)
NAGASHIMA TOSHIKAZU (JP)
NAGASHIMA TOSHIKAZU (JP)
Application Number:
PCT/JP2023/019148
Publication Date:
December 14, 2023
Filing Date:
May 23, 2023
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G01J3/08; G01N21/59
Foreign References:
JPH0979978A | 1997-03-28 | |||
JPS6295448A | 1987-05-01 | |||
JP2021089283A | 2021-06-10 | |||
JP2020159973A | 2020-10-01 | |||
JP2011147966A | 2011-08-04 | |||
JPH1151928A | 1999-02-26 | |||
JPH0974848A | 1997-03-25 |
Attorney, Agent or Firm:
KIMURA Masayoshi (JP)
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