Title:
OPTICAL MICROSCOPE DEVICE AND TESTING APPARATUS COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2013/027514
Kind Code:
A1
Abstract:
This invention allows for observation or capture of high-contrast images for test samples from which no sufficient contrasts can be obtained by bright-field observation, such as wafers having small pattern differences in level. According to the invention, a test sample is illuminated through an objective lens used for image captures, and an aperture filter is disposed in an image-capture optical system, thereby significantly attenuating the light of bright-field observation components and capturing images.
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Inventors:
SHIMURA KEI (JP)
NIIBORI TETSUYA (JP)
OKU MIZUKI (JP)
NAKAI NAOYA (JP)
NIIBORI TETSUYA (JP)
OKU MIZUKI (JP)
NAKAI NAOYA (JP)
Application Number:
PCT/JP2012/068300
Publication Date:
February 28, 2013
Filing Date:
July 19, 2012
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
SHIMURA KEI (JP)
NIIBORI TETSUYA (JP)
OKU MIZUKI (JP)
NAKAI NAOYA (JP)
SHIMURA KEI (JP)
NIIBORI TETSUYA (JP)
OKU MIZUKI (JP)
NAKAI NAOYA (JP)
International Classes:
G02B21/00; G01N23/225
Foreign References:
| JP2005049663A | 2005-02-24 | |||
| JP2010062281A | 2010-03-18 | |||
| JP2003068604A | 2003-03-07 | |||
| JP2007026885A | 2007-02-01 | |||
| JP2004101406A | 2004-04-02 | |||
| JP2000089129A | 2000-03-31 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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Claims:
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