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Title:
OPTICAL OUTPUT MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/276765
Kind Code:
A1
Abstract:
An optical output measurement device 100 measures the optical output of line light emitted from a line light irradiator X to protect a linear motion device 20 from the line light. The optical output measurement device 100 comprises a light reception unit 10 that is arranged in a line light irradiation region Z and a linear motion device 20 that moves the light reception unit 10 in a straight line along the line light. At least a portion of the linear motion device 20 is provided at a position that is offset from the optical axis of the line light.

Inventors:
OKAJIMA AKIKO (JP)
OMAE MAHO (JP)
TOGAWA TAKUZO (JP)
Application Number:
PCT/JP2022/024600
Publication Date:
January 05, 2023
Filing Date:
June 20, 2022
Export Citation:
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Assignee:
CCS INC (JP)
International Classes:
G01J1/02; G01J1/00
Foreign References:
JP2012009642A2012-01-12
JPS62298728A1987-12-25
JP2004163272A2004-06-10
JP2005091271A2005-04-07
JP2000332324A2000-11-30
JP2002340667A2002-11-27
JP2002022602A2002-01-23
JP2016200425A2016-12-01
KR20160134359A2016-11-23
CN211553075U2020-09-22
Attorney, Agent or Firm:
NISHIMURA, Ryuhei et al. (JP)
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