Title:
OPTICAL SCANNING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/161817
Kind Code:
A1
Abstract:
The present invention provides an optical scanning device that accommodates variations in the mounting positions and characteristics of light detection units to improve the detection accuracy of the deflection angle of a mirror unit. An optical scanning device 1 is provided with a control unit 2, a light deflector 3, light detection units, 4a, 4b, and a light source 5. A mirror unit 30 of the light deflector 3 has a flat reflection part 38 for generating scanning light Lb and a groove-type reflection part 39 for generating twice reflected light L2, and performs reciprocating rotation about a rotation axis 36. The light detection units 4a, 4b are disposed at positions on the scanning trajectory of the scanning light Lb where the twice reflected light L2 is received, and are each divided into light detectors 54a, 54b in the scanning direction of the scanning light Lb by a division line 53. The control unit 2 detects a deflection angle θ of the mirror unit 30 on the basis of both outputs of the light detectors 54a, 54b.
Inventors:
MIYACHI MAMORU (JP)
Application Number:
PCT/JP2021/003377
Publication Date:
August 19, 2021
Filing Date:
January 29, 2021
Export Citation:
Assignee:
STANLEY ELECTRIC CO LTD (JP)
International Classes:
G02B26/08; B81B3/00; G02B26/10
Foreign References:
| JP2014056020A | 2014-03-27 | |||
| JPS5571345U | 1980-05-16 | |||
| JP2006243225A | 2006-09-14 | |||
| JP2011118178A | 2011-06-16 | |||
| JP2014056020A | 2014-03-27 | |||
| JP2017207630A | 2017-11-24 |
Other References:
A. D. YALCINKAYAH. UREYD. BROWNT. MONTAGUER. SPRAGUE: "Two-axis electromagnetic microscanner for high resolution displays", J. MICROELECTROMECH. SYST., vol. 15, no. 4, August 2006 (2006-08-01), pages 786 - 794, XP008145248, DOI: 10.1109/JMEMS.2006.879380
H. SCHENKP. DURRD. KUNZEH. LAKNERH. KUCK: "A resonantly excited 2D-micro-scanning-mirror with large deflection", SENS. ACTUATORS A, vol. 89, no. 1, March 2001 (2001-03-01), pages 104 - 111, XP004317252, DOI: 10.1016/S0924-4247(00)00529-X
See also references of EP 4080267A4
H. SCHENKP. DURRD. KUNZEH. LAKNERH. KUCK: "A resonantly excited 2D-micro-scanning-mirror with large deflection", SENS. ACTUATORS A, vol. 89, no. 1, March 2001 (2001-03-01), pages 104 - 111, XP004317252, DOI: 10.1016/S0924-4247(00)00529-X
See also references of EP 4080267A4
Attorney, Agent or Firm:
SATO & ASSOCIATES (JP)
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