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Title:
OPTICAL SPECTRUM MEASUREMENT METHOD, MEASUREMENT DEVICE, AND MEASUREMENT PROGRAM
Document Type and Number:
WIPO Patent Application WO/2019/039421
Kind Code:
A1
Abstract:
Provided are an optical spectrum measurement method, a measurement device, and a measurement program for accurately calculating an optical spectrum during optical spectrum measurement involving the generation of interferograms of a forward phase and an antiphase by means of a polarizer. A calculation device calculates a background from the interferograms of a first phase and a second phase which is an opposite phase of a simulated sample, and calculates the optical spectrum of a measurement sample on the basis of an interferogram obtained by subtracting, from the interferogram of one of the first and second phases of the measurement sample, an interferogram obtained by multiplying, by a factor, an interferogram as the background so that the calculated background overlaps the interferogram of the one phase.

Inventors:
ASANO TAKAHARU (JP)
Application Number:
PCT/JP2018/030621
Publication Date:
February 28, 2019
Filing Date:
August 20, 2018
Export Citation:
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Assignee:
KOWA CO (JP)
International Classes:
G01J3/45; G01J3/02
Domestic Patent References:
WO2001056472A12001-08-09
Foreign References:
JPS62251627A1987-11-02
JPH01176921A1989-07-13
US20070133004A12007-06-14
US6222627B12001-04-24
Attorney, Agent or Firm:
SEKINE, Takehiko et al. (JP)
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