Title:
OPTICAL SYSTEM FOR HIGH RESOLUTION IMAGING
Document Type and Number:
WIPO Patent Application WO/2023/204478
Kind Code:
A1
Abstract:
Disclosed is an optical system for high resolution imaging. According to one aspect of the present embodiment, provided is an optical system for imaging which focuses inspection light and monitoring light on an inspection target, the optical system comprising: a refraction optical group which receives inspection light and monitoring light and primarily focuses same onto different positions; and a reflection and refraction optical group which reflects and refracts the inspection light and monitoring light that have passed through the refraction optical group, and focuses both onto a single focal point.
Inventors:
CHO HYUN IL (KR)
KIM DONG GEUN (KR)
MOON KYOUNG SANG (KR)
KIM JIN HO (KR)
BYUN JAE HEE (KR)
KIM DONG GEUN (KR)
MOON KYOUNG SANG (KR)
KIM JIN HO (KR)
BYUN JAE HEE (KR)
Application Number:
PCT/KR2023/004373
Publication Date:
October 26, 2023
Filing Date:
March 31, 2023
Export Citation:
Assignee:
GREEN OPTICS CO LTD (KR)
International Classes:
G02B13/00; G02B17/08; G02B27/00
Foreign References:
| US20030002147A1 | 2003-01-02 | |||
| KR20160133473A | 2016-11-22 | |||
| JP2014078032A | 2014-05-01 | |||
| KR20140065366A | 2014-05-29 | |||
| KR20150141820A | 2015-12-21 | |||
| KR102507043B1 | 2023-03-07 |
Attorney, Agent or Firm:
KIM, Tae Young (KR)
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