OPTICAL SYSTEM FOR USE IN LASER INTERFEROMETER FOR MEASURING STRAIGHTNESS OF GUIDING RAIL

Title:

OPTICAL SYSTEM FOR USE IN LASER INTERFEROMETER FOR MEASURING STRAIGHTNESS OF GUIDING RAIL

Document Type and Number:

WIPO Patent Application WO/2017/193680

Kind Code:

A1

Abstract:

An optical system for use in a laser interferometer for measuring the straightness of a guiding rail comprises: a detection optical assembly (1); an optical deflecting mirror (2); a rotatable laser head (3); and an outer light path assembly. The detection optical assembly (1) realizes two-pass optical detection of a light beam passing therethrough. The optical deflecting mirror (2) is used to realize a downward movement and rotation of the light beam so as to adapt to a detection requirement of the detection optical assembly. The rotatable laser head (3) is a rotatable back-reflection element disposed between the detection optical assembly (1) and the outer light path assembly. The outer light path assembly is used to measure an outer light path of an optical system. The optical deflecting mirror (2) simplifies an arrangement and steps for straightness measurement in a vertical direction. The detection optical assembly (1) realizes two-pass optical detection, thereby reducing the number of optical members in the optical system, maximizing utilization of the optical members, and reducing the space required for an instrument. Moreover, the design of a hole for a back-reflected laser beam at the rotatable laser head (3) fully exploits an existing hole and is thus more reasonable.

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Inventors:

LIU LONGWEI (CN)
ZHANG HEJUN (CN)
ZHANG KE (CN)
CHEN YUAN (CN)

Application Number:

PCT/CN2017/075817

Publication Date:

November 16, 2017

Filing Date:

March 07, 2017

Export Citation:

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Assignee:

CHOTEST TECH INC (CN)

International Classes:

G01B11/26; G01B11/27

Foreign References:

CN105841638A	2016-08-10
CN1417556A	2003-05-14
CN101915560A	2010-12-15
CN101210803A	2008-07-02
CN101581576A	2009-11-18
CN103308004A	2013-09-18
US20020054298A1	2002-05-09

Attorney, Agent or Firm:

SZ KINDWALF INTELLECTUAL PROPERTY FIRM (CN)

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