Title:
OPTIMIZATION PROCESS AND DEVICE FOR INSOLUBLE ANODE ACID SULFATE COPPER ELECTROPLATING
Document Type and Number:
WIPO Patent Application WO/2022/143860
Kind Code:
A1
Abstract:
Disclosed in the present invention is an optimization process for insoluble anode acid sulfate copper electroplating. An electroplating tank, an electroplating power supply, and an insoluble anode are comprised. A plating piece serves as a cathode, and an acid sulfate copper electroplating solution serves as an electroplating solution. The process is characterized by: using a coated titanium material, in the shape of mesh or plate which has a hollow structure, as the insoluble anode, and adding at least one liquid suction pipe/port onto the surface of the insoluble anode away from the cathode, such that the electroplating solution generates a liquid flow by means of the overflow of the liquid suction pipe/port or/and an electric liquid suction mode; turning on the electroplating power supply to perform electroplating production operation, suctioning away the electroplating solution by means of the overflow of the liquid suction pipe/port or/and the electric liquid suction mode, such that the electroplating solution in the electroplating tank forms a liquid flow flowing towards the liquid suction pipe/port; and correspondingly adding the electroplating solution into the electroplating tank to maintain the amount of electroplating solution in the electroplating tank, until electroplating is completed and the plating piece is taken out. The process can effectively improve the uniformity of an electroplated metal copper layer and improve the quality of electroplating.
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Inventors:
YE TAO (CN)
YE YITING (CN)
YE YITING (CN)
Application Number:
PCT/CN2021/142832
Publication Date:
July 07, 2022
Filing Date:
December 30, 2021
Export Citation:
Assignee:
YE TAO (CN)
YE YITING (CN)
YE YITING (CN)
International Classes:
C25D5/00; C25D3/38
Foreign References:
| CN1138638A | 1996-12-25 | |||
| CN208762590U | 2019-04-19 | |||
| JPH05214598A | 1993-08-24 | |||
| CN109056002A | 2018-12-21 | |||
| CN107313085A | 2017-11-03 |
Attorney, Agent or Firm:
GUANGZHOU ZHIYOU PATENT & TRADEMARK AGENCY CO., LTD. (CN)
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