Title:
ORGANIC SEMICONDUCTOR FILM, METHOD FOR MANUFACTURING SAME, AND TRANSISTOR STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2014/196487
Kind Code:
A1
Abstract:
Provided is an organic semiconductor film with which a desired band gap can be securely achieved. In an ultrahigh vacuum film formation device (10), 5,5',5", 5'", 5"", 5'""-hexabromocyclohexa-m-phenylene (CHP) powder is made to sublimate from a fuel cell (12) by the application of heat energy, bromine is made to separate out by causing the CHP molecules to collide with a catalyst metal layer (M) of a substrate (G), and a plurality of generated phenyl radicals are made to mutually bond through Ullmann reactions, thereby forming a two-dimensional network structure of carbon atoms.
Inventors:
KAGAYA MUNEHITO (JP)
MATSUMOTO TAKASHI (JP)
KATO TAIKI (JP)
MATSUMOTO TAKASHI (JP)
KATO TAIKI (JP)
Application Number:
PCT/JP2014/064563
Publication Date:
December 11, 2014
Filing Date:
May 27, 2014
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L51/30; C07C2/68; C07C15/14; C07C15/20; C08G61/10; H01L29/786; H01L51/05; H01L51/40
Domestic Patent References:
| WO2011111719A1 | 2011-09-15 |
Foreign References:
| JP2003516422A | 2003-05-13 | |||
| JP2007242712A | 2007-09-20 | |||
| JP2013071208A | 2013-04-22 |
Other References:
BIERI M. ET AL: "TWO DIMENSIONAL POLYMER FORMATION ON SURFACES INSIGHT INTO THE ROLES OF PRECURSOR MOBILITY AND REACTIVITY", JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2 November 2010 (2010-11-02), pages 16669 - 16676
BALAZS H. ET AL: "NOVEL SERIES OF GIANT POLYCYCLIC AROMATIC HYDROCARBONS ELECTRONIC STRUCTURE AND AROMATICITY", CHEMICAL PHYSICS LETTERS, vol. 385, 2004, pages 512 - 518
BALAZS H. ET AL: "NOVEL SERIES OF GIANT POLYCYCLIC AROMATIC HYDROCARBONS ELECTRONIC STRUCTURE AND AROMATICITY", CHEMICAL PHYSICS LETTERS, vol. 385, 2004, pages 512 - 518
Attorney, Agent or Firm:
BECCHAKU, Shigehisa et al. (JP)
Role of another Shigehisa (JP)
Role of another Shigehisa (JP)
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