Title:
ORGANIC TFT ARRAY INSPECTION DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2016/024585
Kind Code:
A1
Abstract:
To provide an inspection device and method with which it is possible to detect a disconnection defect in an organic TFT array and/or to evaluate variation in the output characteristics and response speed of individual organic TFT elements. A device and method for optically measuring the presence/absence of carrier accumulation in an organic semiconductor thin film for providing the channel layer of an organic TFT element. This invention is characterized in that the source and drain in an organic TFT are short-circuited, application of a voltage between the short circuit and a gate is switched on and off with a predetermined period, monochromatic light is synchronized at a predetermined period while being emitted, the images before and after voltage application are captured, and a corresponding differential image is obtained.
Inventors:
TSUTSUMI JUNYA (JP)
MATSUOKA SATOSHI (JP)
YAMADA TOSHIKAZU (JP)
HASEGAWA TATSUO (JP)
MATSUOKA SATOSHI (JP)
YAMADA TOSHIKAZU (JP)
HASEGAWA TATSUO (JP)
Application Number:
PCT/JP2015/072738
Publication Date:
February 18, 2016
Filing Date:
August 11, 2015
Export Citation:
Assignee:
NAT INST OF ADVANCED IND SCIEN (JP)
International Classes:
H01L21/336; G01M11/00; G02F1/1368; G09F9/00; H01L21/337; H01L21/338; H01L21/66; H01L29/786; H01L29/808; H01L29/812; H01L51/05
Foreign References:
| JP2013004637A | 2013-01-07 | |||
| JP2008218957A | 2008-09-18 | |||
| JP2007073619A | 2007-03-22 |
Other References:
TSUTSUMI, JUN'YA ET AL.: "Gate-modulation imaging of organic thin-film transistor arrays: Visualization of distributed mobility and dead pixels", ORGANIC ELECTRONICS, vol. 25, 4 July 2015 (2015-07-04), pages 289 - 294, XP029252359, DOI: doi:10.1016/j.orgel.2015.06.047
See also references of EP 3182441A4
See also references of EP 3182441A4
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