Title:
OSCILLATION DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2020/170937
Kind Code:
A1
Abstract:
Provided is an oscillation device that allows for improved productivity, improved reliability, and increased vibration efficiency. An oscillation device 1 is provided with: an oscillator plate 6 comprising first and second oscillating parts 8, 9 (oscillating part) and a fixed part 7; first and second piezoelectric oscillators 13A, 13B (oscillators) provided to the first and second oscillating parts 8, 9; and fixed electrodes 17A, 17B. The fixed part 7 comprises a first side 7A and a second side 7B that extend in different directions. The oscillator plate 6 and the fixed electrodes 17A–17D are a single integrated member. The first oscillating part 8 extends from the first side 7A, and the fixed electrodes 17A, 17B extend from the second side 7B.
Inventors:
IKEDA KAZUYUKI (JP)
KAGAYAMA KENJI (JP)
TOKOI SHOGO (JP)
KAGAYAMA KENJI (JP)
TOKOI SHOGO (JP)
Application Number:
PCT/JP2020/005582
Publication Date:
August 27, 2020
Filing Date:
February 13, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
B06B1/06; H01L41/053; H01L41/083; H01L41/09; H04R17/00
Domestic Patent References:
| WO2015163166A1 | 2015-10-29 |
Foreign References:
| JPS6020454Y2 | 1985-06-19 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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