Title:
OXIDE FILM THICKNESS MEASUREMENT DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2020/095600
Kind Code:
A1
Abstract:
This oxide film thickness measurement device stores, for each of a plurality of sub-film-thickness measurement ranges obtained by dividing a film thickness measurement range, film thickness conversion information about the correspondence relationship between film thickness and emissivity resulting in the ratio of emissivity variation to film thickness variation within the sub-film-thickness measurement range being within a set range; measures the radiation brightnesses of the surface of a steel sheet at a plurality of different measurement wavelengths and the temperature of the surface of the steel sheet and determines the emissivities at each measurement wavelength; for each emissivity determined for each measurement wavelength, uses the film thickness conversion information corresponding to the measurement wavelength to determine the film thickness corresponding to the emissivity at the measurement wavelength and the ratio at the film thickness; and if the determined ratio is within a prescribed set range associated with the film thickness conversion information, extracts the determined film thickness as a candidate value for the actual film thickness.
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Inventors:
INUI MASAHIRO
TAKAMATSU HIROYUKI
NAKANISHI RYOTA
TAKAMATSU HIROYUKI
NAKANISHI RYOTA
Application Number:
PCT/JP2019/039544
Publication Date:
May 14, 2020
Filing Date:
October 07, 2019
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
International Classes:
G01B11/06; G01J5/00; C23C2/06
Foreign References:
| JP2011202968A | 2011-10-13 | |||
| JP2005139557A | 2005-06-02 | |||
| JPH09127012A | 1997-05-16 | |||
| JPH03293504A | 1991-12-25 | |||
| JP2018211334A | 2018-11-09 |
Other References:
KAZUO HIRAMOTO: "The Behavior of Spectral Emissivity of Metal in Oxidation Process", IRON AND STEEL, vol. 85, no. 12, 1999, pages 863 - 869
See also references of EP 3848668A4
See also references of EP 3848668A4
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
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