Title:
OXIDE SINTERED BODY AND SPUTTERING TARGET, AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2014/042138
Kind Code:
A1
Abstract:
An oxide sintered body which is obtained by mixing and sintering zinc oxide, indium oxide, gallium oxide and tin oxide. The relative density of the oxide sintered body is 85% or more and the average crystal grain size of crystal grains observed on the surface of the oxide sintered body is less than 10 μm. X-ray diffraction of the oxide sintered body shows that a Zn2SnO4 phase and an InGaZnO4 phase are the main phases and that an InGaZn2O5 phase is contained in an amount of 3 volume% or less.
Inventors:
TAO YUKI
HATA HIDEO
NAMBU AKIRA
KANAMARU MORIYOSHI
HATA HIDEO
NAMBU AKIRA
KANAMARU MORIYOSHI
Application Number:
PCT/JP2013/074338
Publication Date:
March 20, 2014
Filing Date:
September 10, 2013
Export Citation:
Assignee:
KOBELCO RES INST INC (JP)
International Classes:
C04B35/453; C04B35/00; C23C14/34; H01L21/363
Domestic Patent References:
| WO2009142289A1 | 2009-11-26 |
Foreign References:
| JP2012114367A | 2012-06-14 | |||
| JP2012158512A | 2012-08-23 | |||
| JP2003242684A | 2003-08-29 |
Attorney, Agent or Firm:
HAMADA Yuriko et al. (JP)
Yuriko Hamada (JP)
Yuriko Hamada (JP)
Download PDF:
Previous Patent: COMMUNICATION SYSTEM AND METHOD, AND SERVER DEVICE AND TERMINAL
Next Patent: OXIDE SINTERED BODY AND SPUTTERING TARGET
Next Patent: OXIDE SINTERED BODY AND SPUTTERING TARGET