Title:
OZONE-CONTAINING GAS GENERATING METHOD AND OZONE-CONTAINING GAS GENERATING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/243288
Kind Code:
A1
Abstract:
Provided are a method and a system that can produce, with a simple structure, an ozone-containing gas having a pressure higher than that obtained from conventional means. This ozone-containing gas generating method comprises: a step (a) for introducing, into an ozone production space, a material gas containing oxygen in a state of having a pressure higher than the atmospheric pressure; a step (b) for irradiating the material gas with ultraviolet rays emitted from an excimer lamp in the ozone production space; and a step (c) for discharging, to the outside of the ozone production space, the ozone-containing gas that has been produced in the step (b) and that has a pressure higher than the atmospheric pressure.
Inventors:
NAITO KEISUKE (JP)
Application Number:
PCT/JP2023/018242
Publication Date:
December 21, 2023
Filing Date:
May 16, 2023
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
C01B13/10; H01J65/00; H01T23/00
Foreign References:
| JP2016037416A | 2016-03-22 | |||
| CN112441563A | 2021-03-05 | |||
| JP2020011856A | 2020-01-23 | |||
| JP2014148937A | 2014-08-21 | |||
| JP2019206463A | 2019-12-05 |
Attorney, Agent or Firm:
KIMURA Masayoshi (JP)
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