Title:
OZONE SUPPLYING DEVICE AND OZONE SUPPLYING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/202271
Kind Code:
A1
Abstract:
Residual high-concentration ozone from a preceding supplying step leaks in a subsequent adsorbing step, thus being discarded. To address this, the present invention includes: a first adsorption/desorption tower (3a) and a second adsorption/desorption tower (3b); an exhaust gas circuit (R0) that discharges a gas discharged from the first adsorption/desorption tower (3a) to outside the device; an adsorption/recovery gas circuit (R1) that discharges the gas discharged from the first adsorption/desorption tower (3a) to outside the device after making the gas pass through the second adsorption/desorption tower (3b); a circuit switch (5) that switches flow channels of the exhaust gas circuit (R0) and the adsorption/recovery gas circuit (R1); and a control unit (6) that controls opening/closing of the circuit switch (5) in accordance with the state of the first adsorption/desorption tower (3a) and the state of the second adsorption/desorption tower (3b).
Inventors:
MATSUURA YOKO (JP)
WADA NOBORU (JP)
WADA NOBORU (JP)
Application Number:
PCT/JP2019/014057
Publication Date:
October 08, 2020
Filing Date:
March 29, 2019
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
C01B13/10
Domestic Patent References:
| WO2009069772A1 | 2009-06-04 |
Foreign References:
| JP2009215164A | 2009-09-24 | |||
| US20180065079A1 | 2018-03-08 | |||
| CN207591553U | 2018-07-10 | |||
| JPH1143308A | 1999-02-16 | |||
| JPH1143309A | 1999-02-16 | |||
| JPS50116390A | 1975-09-11 | |||
| JPH09235104A | 1997-09-09 |
Other References:
See also references of EP 3950580A4
Attorney, Agent or Firm:
OIWA Masuo et al. (JP)
Download PDF: