Title:
OZONE WATER SUPPLY METHOD AND OZONE WATER SUPPLY DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/125500
Kind Code:
A1
Abstract:
This ozone water supply method is characterized in that: while starting material ultrapure water is supplied to a circulation tank and returned ozone water that was not used at a use point is returned to the circulation tank, water for dissolution within the circulation tank is supplied to an ozone dissolution means at a certain supply quantity, ozone-dissolved water is obtained by dissolving ozone in the water for dissolution by means of the ozone dissolution means, and then the obtained ozone-dissolved water is supplied to a use point; oxygen gas having a nitrogen gas content of no greater than 0.01 vol% is supplied as a starting material oxygen gas to a discharge-type ozone generation means, and then the obtained ozone-containing gas is supplied to the ozone dissolution means; the amount of starting material ultrapure water supplied to the circulation tank is adjusted; and the dissolved ozone concentration in the ozone dissolved water is adjusted. By means of the present invention, it is possible to provide an ozone water supply method that can suppress the accumulation of nitric acid in the circulating system when using a discharge-type ozone generation means, and an ozone water supply device for carrying out the ozone water supply method.
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Inventors:
HAYASHI YOSHIFUMI (JP)
YAMASHITA YUKINARI (JP)
YAMANAKA KOJI (JP)
YAMASHITA YUKINARI (JP)
YAMANAKA KOJI (JP)
Application Number:
PCT/JP2015/050098
Publication Date:
August 27, 2015
Filing Date:
January 06, 2015
Export Citation:
Assignee:
ORGANO CORP (JP)
International Classes:
C02F1/78; B01F23/70; C01B13/10
Domestic Patent References:
| WO2005080263A1 | 2005-09-01 |
Foreign References:
| JP2013202451A | 2013-10-07 | |||
| JP2008221144A | 2008-09-25 |
Attorney, Agent or Firm:
AKATSUKA Kenji et al. (JP)
Kenji Akatsuka (JP)
Kenji Akatsuka (JP)
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