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Title:
PARAMETER DESIGN ASSISTANCE DEVICE, AND PARAMETER DESIGN ASSISTANCE METHOD
Document Type and Number:
WIPO Patent Application WO/2019/021670
Kind Code:
A1
Abstract:
A parameter design assistance device (2) comprises a storage unit (24) and a control unit (25). The storage unit (24) stores recipes for controlling a substrate processing device (1). The control unit (25) acquires at least one standard value of each of a plurality of control factors. The standard value shows the conditions when the substrate processing device (1) processes a substrate (11). The control unit (25) generates combination information showing the combination of the acquired standard values using a statistical method. The control unit (25) produces an evaluation recipe for each combination of standard values on the basis of the recipes stored in the storage unit (24) and the combination information. When the evaluation recipe includes a parameter that corresponds to the control factor, the control unit (25) sets the standard value of the corresponding control factor as the parameter value of that parameter.

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Inventors:
INOUE MASAFUMI (JP)
Application Number:
PCT/JP2018/022750
Publication Date:
January 31, 2019
Filing Date:
June 14, 2018
Export Citation:
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Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/02
Foreign References:
JP2007258563A2007-10-04
JP2003297892A2003-10-17
JP2008217513A2008-09-18
JP2001265830A2001-09-28
Attorney, Agent or Firm:
MAEI Hiroyuki (JP)
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