Title:
PARTICLE INJECTION DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2011/030459
Kind Code:
A1
Abstract:
A particle injection device comprises a section for providing a structure, on which a pattern for forming cells is formed, with particles being injected thereto, a mask located above the structure while having a pattern identical to the above-mentioned pattern, a stage on which the structure and the mask are installed while being arranged, and a scraper intersecting the mask and removing particles existing above the mask. The section for providing particles includes a particle arrangement drum having a plurality of drums which rotate in the directions opposite from each other so that the particles are injected to the structure while being distributed uniformly, and are arranged so that the central axes are directed in the width direction of the structure.
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Inventors:
YOUN HAE SANG (KR)
KIM SUNG WOON (KR)
YOON SONG HYUN (KR)
CHO DO SEOK (KR)
PARK SUN WOO (KR)
KIM KYUNG SOO (KR)
KIM SUNG WOON (KR)
YOON SONG HYUN (KR)
CHO DO SEOK (KR)
PARK SUN WOO (KR)
KIM KYUNG SOO (KR)
Application Number:
PCT/JP2009/066012
Publication Date:
March 17, 2011
Filing Date:
September 14, 2009
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
YOUN HAE SANG (KR)
KIM SUNG WOON (KR)
YOON SONG HYUN (KR)
CHO DO SEOK (KR)
PARK SUN WOO (KR)
KIM KYUNG SOO (KR)
YOUN HAE SANG (KR)
KIM SUNG WOON (KR)
YOON SONG HYUN (KR)
CHO DO SEOK (KR)
PARK SUN WOO (KR)
KIM KYUNG SOO (KR)
International Classes:
G02F1/1679
Domestic Patent References:
| WO2006118116A1 | 2006-11-09 |
Foreign References:
| JP2007086461A | 2007-04-05 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
Tetsuo Kanamoto (JP)
Tetsuo Kanamoto (JP)
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