PARTICLE SIZE DISTRIBUTION MEASURING DEVICE AND PROGRAM FOR PARTICLE SIZE DISTRIBUTION MEASURING DEVICE

Title:

PARTICLE SIZE DISTRIBUTION MEASURING DEVICE AND PROGRAM FOR PARTICLE SIZE DISTRIBUTION MEASURING DEVICE

Document Type and Number:

WIPO Patent Application WO/2019/230624

Kind Code:

A1

Abstract:

In order to accurately obtain a particle size distribution of a particle group to be measured, even when the influence of a particle group not being subjected to measurement is large, a particle size distribution measuring device 100 irradiates, with light, a particle group to be measured contained in a cell 11, and calculates a particle size distribution of the particle group on the basis of an optical intensity signal indicative of the optical intensity of the resultant diffracted/scattered light, and is configured to be provided with: an actual spectrum acquisition unit 21 that acquires an actual spectrum which is an optical intensity spectrum obtained from an optical intensity signal; a non-target spectrum calculation unit 22 that receives non-target particle size distribution data indicating a particle size distribution of a non-target particle group which is contained in the cell 11 but is not an object X to be measured, and that calculates, on the basis of the non-target particle size distribution data, a non-target spectrum which is an optical intensity spectrum expected to be obtained upon irradiation of the non-target particle group with light; a non-target spectrum removing unit 23 that calculates a target spectrum which is an optical intensity spectrum obtained by subtracting the influence amount of the non-target spectrum from the actual spectrum; and a target particle size distribution calculation unit 24 that calculates a particle size distribution of a particle group which is the object X to be measured, on the basis of the target spectrum target spectrum.

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Inventors:

MORI TETSUYA (JP)
AKIYAMA HISASHI (JP)
NAGURA MAKOTO (JP)

Application Number:

PCT/JP2019/020824

Publication Date:

December 05, 2019

Filing Date:

May 27, 2019

Export Citation:

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Assignee:

HORIBA LTD (JP)

International Classes:

G01N15/02

Domestic Patent References:

WO2018092462A1

2018-05-24

Foreign References:

JP2018004450A	2018-01-11
JP2016048185A	2016-04-07
JP2017167081A	2017-09-21
JP2008164539A	2008-07-17
JP2018004450A	2018-01-11

Other References: