Title:
PERMEABLE GAS ASSEMBLY FOR GAS DELIVERY
Document Type and Number:
WIPO Patent Application WO2004053367
Kind Code:
B1
Abstract:
A valve assembly for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool comprising a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating member that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and provides a diffusional path for transfer of all flowing fluid when the valve poppet is in an open position. The permeable insert can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet.
Inventors:
TOM GLENN
Application Number:
PCT/US2003/037735
Publication Date:
December 29, 2005
Filing Date:
November 24, 2003
Export Citation:
Assignee:
ADVANCED TECH MATERIALS (US)
International Classes:
F16K1/30; F16K25/00; (IPC1-7): F16K51/00
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