Title:
PEROVSKITE THIN FILM COATING APPARATUS, USING METHOD, AND APPLICATION
Document Type and Number:
WIPO Patent Application WO/2018/219152
Kind Code:
A1
Abstract:
A perovskite thin film coating apparatus, comprising a conveying device for conveying a substrate (2), a perovskite solution coating device, an anti-solvent spray coating device, and an air drying device or heat drying device (6). The perovskite solution coating device is provided with a perovskite coating head (3). The anti-solvent spray coating device is provided with an anti-solvent spray coating mouth (4). The substrate (2) is carried by the conveying device to sequentially pass by the perovskite solution coating device, the anti-solvent spray coating device, and the air drying device or heat drying device (6); wind from an air outlet (5) simultaneously dries a perovskite solution and an anti-solvent on the surface of the substrate (2) by means of evaporation to form a perovskite thin film. Also provided are a using method for and an application of the coating apparatus. By improving the existing apparatuses of a one-step solution method and a two-step solution method, using methods and applications, and performing air drying or infrared heat drying on a substrate spray-coated or coated with a perovskite solution, the present invention improves the film forming quality while ensuring low production cost, and is suitable for large-scale production of perovskite thin films of substrates.
Inventors:
YAO JIZHONG (CN)
YAN BUYI (CN)
YAN BUYI (CN)
Application Number:
PCT/CN2018/087346
Publication Date:
December 06, 2018
Filing Date:
May 17, 2018
Export Citation:
Assignee:
HANGZHOU MICROQUANTA SEMICONDUCTOR CORPORATION LTD (CN)
International Classes:
B05C9/06; H01L51/48
Foreign References:
| CN105870328A | 2016-08-17 | |||
| CN106449882A | 2017-02-22 | |||
| CN106340587A | 2017-01-18 | |||
| CN104756599A | 2015-07-01 | |||
| CN207103057U | 2018-03-16 | |||
| CN105789451A | 2016-07-20 | |||
| US20150311364A1 | 2015-10-29 | |||
| CN106252520A | 2016-12-21 | |||
| CN106486602A | 2017-03-08 | |||
| CN105870337A | 2016-08-17 | |||
| CN106784322A | 2017-05-31 |
Attorney, Agent or Firm:
HANGZHOU AOCHUANG INTELLECTUAL PROPERTY AGENCY CO.,LTD (CN)
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