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Title:
PHASE MODULATION DEVICE AND LASER MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2013/115383
Kind Code:
A1
Abstract:
A phase modulation device (3) corrects wave surface aberration arising due to an optical system that includes an objective lens (4) disposed on the light path of luminous flux of coherent light emitted from a coherent light source (1). In order to do so, the phase modulation device (3) has a phase modulation element (11) in which a plurality of electrodes are formed and that is for modulating the phase of luminous flux according to a voltage applied to those electrodes, and a control circuit (12) for controlling the voltage applied to the plurality of electrodes. The control circuit controls the voltage applied to the plurality of electrodes so that a phase modulation amount is applied to luminous flux, the phase modulation amount is in accordance with a phase modulation profile having phase distribution reverse polarity determined according to a relational expression of the numerical aperture of the objective lens (4) and the ratio between third-order spherical aberration and fifth-order spherical aberration when resolving using Zernike polynomials the phase distribution of waveform aberration arising due to an optical system.

Inventors:
MATSUMOTO KENJI (JP)
TANABE AYANO (JP)
YOKOYAMA MASAFUMI (JP)
HASHIMOTO NOBUYUKI (JP)
KURIHARA MAKOTO (JP)
Application Number:
PCT/JP2013/052390
Publication Date:
August 08, 2013
Filing Date:
February 01, 2013
Export Citation:
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Assignee:
CITIZEN HOLDINGS CO LTD (JP)
MATSUMOTO KENJI (JP)
TANABE AYANO (JP)
YOKOYAMA MASAFUMI (JP)
HASHIMOTO NOBUYUKI (JP)
KURIHARA MAKOTO (JP)
International Classes:
G02F1/01; G02B3/14; G02B21/00; G02F1/13
Foreign References:
JP2006330089A2006-12-07
JP2005267756A2005-09-29
JP2007134023A2007-05-31
JP3299808B22002-07-08
JP4149309B22008-09-10
Other References:
TOSHIRO KISHIKAWA: "Introduction to Optics for User Engineers", OPTRONICS CO., LTD., pages: 198
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
Aoki 篤 (JP)
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Claims:



 
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