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Patent Searching and Data


Title:
PHOTODETECTOR AND BEATING SPECTROSCOPY DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/059260
Kind Code:
A1
Abstract:
A photodetector (10) comprises: a semiconductor substrate (11); a mesa part (12) that is formed on a main surface (11a) of the semiconductor substrate (11) so as to extend along an optical waveguiding direction (A); a first contact layer (13); a second contact layer (14); a first electrode (15); and air bridge wiring (16) that is electrically connected to the first contact layer (13) and the first electrode (15). When viewed from a direction that is perpendicular to the main surface (11a) of the semiconductor substrate (11), the length (L1) of the mesa part (12) in the optical waveguiding direction (A) is longer than the length (L2) of the mesa part in a direction that is perpendicular to the optical waveguiding direction (A). The air bridge wiring (16) is drawn out from the first contact layer (13) to one side in the direction that is perpendicular to the optical waveguiding direction (A), and bridges the first contact layer (13) and the first electrode (15).

Inventors:
DOUGAKIUCHI TATSUO (JP)
ITO AKIO (JP)
HITAKA MASAHIRO (JP)
EDAMURA TADATAKA (JP)
Application Number:
PCT/JP2021/020021
Publication Date:
March 24, 2022
Filing Date:
May 26, 2021
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01L31/02; G01N21/39; H01L31/0264
Foreign References:
JP2017003301A2017-01-05
JPH0961676A1997-03-07
JP2011114015A2011-06-09
US20170250083A12017-08-31
JP2017147428A2017-08-24
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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