Title:
PHOTOELECTRIC CONVERSION DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2015/025637
Kind Code:
A1
Abstract:
Provided is a photoelectric conversion device in which the anomalous transmission of light having a wavelength that does not normally transmit can be prevented and the half-width of a spectral waveform can be reduced and also provided is a method for manufacturing the photoelectric conversion device. A first photoelectric conversion element (101) is formed on a substrate (100). A first metal film (31) having a plurality of openings (41) arranged periodically or aperiodically is formed above the first photoelectric conversion element (101) with insulating films (1, 2, 3) interposed therebetween. A second metal film (32) is also provided that covers a part of the openings (41) of the first metal film (31).
Inventors:
NATSUAKI KAZUHIRO
UCHIDA MASAYO
TAKIMOTO TAKAHIRO
AWAYA NOBUYOSHI
ISHIHARA KAZUYA
NAKANO TAKASHI
NAKURA MITSURU
UCHIDA MASAYO
TAKIMOTO TAKAHIRO
AWAYA NOBUYOSHI
ISHIHARA KAZUYA
NAKANO TAKASHI
NAKURA MITSURU
Application Number:
PCT/JP2014/068614
Publication Date:
February 26, 2015
Filing Date:
July 11, 2014
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L31/10; G02B5/20; H01L21/3205; H01L21/768; H01L23/522; H01L27/14
Domestic Patent References:
| WO2011142456A1 | 2011-11-17 | |||
| WO2008075763A1 | 2008-06-26 | |||
| WO2011155529A1 | 2011-12-15 |
Foreign References:
| JP2012059865A | 2012-03-22 | |||
| JP2010016114A | 2010-01-21 | |||
| JP2010080686A | 2010-04-08 | |||
| JP2001291265A | 2001-10-19 | |||
| JP2003014622A | 2003-01-15 | |||
| JP2010186818A | 2010-08-26 |
Attorney, Agent or Firm:
SAMEJIMA, Mutsumi et al. (JP)
Mutsumi Sameshima (JP)
Mutsumi Sameshima (JP)
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