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Title:
PHOTOELECTRIC CONVERSION ELEMENT AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2016/140309
Kind Code:
A1
Abstract:
Provided is a photoelectric conversion element with which it is possible to obtain a high fill factor and high open voltage (Voc), and a method for manufacturing the photoelectric conversion element. Provided are a semiconductor substrate (1) having a first surface (1a), an i-type amorphous semiconductor film (2) on the first surface (1a), a first-conductivity-type amorphous semiconductor film (3) on the i-type amorphous semiconductor film (2), a second-conductivity-type amorphous semiconductor film (4) on the first surface (1a), a first electrode (7) on the first-conductivity-type amorphous semiconductor film (3), and a second electrode (8) on the second-conductivity-type amorphous semiconductor film (4). In the second-conductivity-type amorphous semiconductor film (4), the second-conductivity-type impurity concentration of a first portion (4A) contacting the first surface (1a) is lower than the second-conductivity-type impurity concentration of a second portion (4B) contacting the second electrode (8), and higher than the second-conductivity-type impurity concentration of the i-type amorphous semiconductor film (2).

Inventors:
ISAKA TAKAYUKI
OKAMOTO CHIKAO
TADOKORO HIROYUKI
ISHII MASAHITO
SUGANUMA RIHITO
Application Number:
PCT/JP2016/056593
Publication Date:
September 09, 2016
Filing Date:
March 03, 2016
Export Citation:
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Assignee:
SHARP KK (JP)
International Classes:
H01L31/0747; H01L31/18
Foreign References:
JP2011061197A2011-03-24
JP2013191657A2013-09-26
JP2013125891A2013-06-24
US20120048370A12012-03-01
JP2010147324A2010-07-01
JP2008021993A2008-01-31
US20080173347A12008-07-24
Attorney, Agent or Firm:
Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)
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