Title:
PHOTOSENSITIVE ADHESIVE COMPOSITION, PHOTOSENSITIVE FILM ADHESIVE, ADHESIVE PATTERN, SEMICONDUCTOR WAFER WITH ADHESIVE, SEMICONDUCTOR DEVICE AND ELECTRONIC COMPONENT
Document Type and Number:
WIPO Patent Application WO/2010/024295
Kind Code:
A1
Abstract:
A photosensitive adhesive composition that can form adhesive patterns by forming an adhesive layer on an adherend and performing a radiation exposure and development by a developing solution. The photosensitive adhesive composition has solubility and developability, and the film thickness T1 (μm) of the adhesive pattern formed after the development satisfies the conditions represented by formula (1). (T1/T0)×100≥90 (1) [In the formula (1), T0 represents the film thickness (μm) of the adhesive layer before the development.]
Inventors:
KAWAMORI TAKASHI (JP)
MITSUKURA KAZUYUKI (JP)
MASUKO TAKASHI (JP)
KATOGI SHIGEKI (JP)
MITSUKURA KAZUYUKI (JP)
MASUKO TAKASHI (JP)
KATOGI SHIGEKI (JP)
Application Number:
PCT/JP2009/064871
Publication Date:
March 04, 2010
Filing Date:
August 26, 2009
Export Citation:
Assignee:
HITACHI CHEMICAL CO LTD (JP)
KAWAMORI TAKASHI (JP)
MITSUKURA KAZUYUKI (JP)
MASUKO TAKASHI (JP)
KATOGI SHIGEKI (JP)
KAWAMORI TAKASHI (JP)
MITSUKURA KAZUYUKI (JP)
MASUKO TAKASHI (JP)
KATOGI SHIGEKI (JP)
International Classes:
C09J201/00; C09J4/02; C09J7/00; C09J7/02; C09J163/00; C09J179/08; C09J201/06; H01L21/52
Domestic Patent References:
WO2007004569A1 | 2007-01-11 | |||
WO2008123110A1 | 2008-10-16 | |||
WO2008149625A1 | 2008-12-11 | |||
WO2009090922A1 | 2009-07-23 | |||
WO2007004569A1 | 2007-01-11 |
Foreign References:
JP2008088403A | 2008-04-17 | |||
JP2003113205A | 2003-04-18 | |||
JPH01179935A | 1989-07-18 | |||
JPS385997B1 | ||||
JP2001270943A | 2001-10-02 | |||
JP2008007744A | 2008-01-17 | |||
JP2008003582A | 2008-01-10 | |||
JP2008260907A | 2008-10-30 | |||
JP2009164574A | 2009-07-23 | |||
JP2009227959A | 2009-10-08 | |||
JP2000290501A | 2000-10-17 | |||
JP2001329233A | 2001-11-27 | |||
JPH1124257A | 1999-01-29 |
Other References:
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, vol. 12, 1999, pages 313 - 314
CHEMISTRY OF MATERIALS, vol. 11, 1999, pages 170 - 176
JOURNAL OF AMERICAN CHEMICAL SOCIETY, vol. 118, 1996, pages 12925
POLYMER JOURNAL, vol. 28, 1996, pages 795
CHEMISTRY OF MATERIALS, vol. 11, 1999, pages 170 - 176
JOURNAL OF AMERICAN CHEMICAL SOCIETY, vol. 118, 1996, pages 12925
POLYMER JOURNAL, vol. 28, 1996, pages 795
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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