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Title:
PIEZOELECTRIC ACTUATOR AND MANUFACTURING METHOD FOR PIEZOELECTRIC ACTUATOR
Document Type and Number:
WIPO Patent Application WO/2011/132532
Kind Code:
A1
Abstract:
Disclosed is a piezoelectric actuator with improved simplicity of construction and manufacturing flow. A fixed electrode (12) is formed on a base substrate (11). A dielectric layer (13) is formed on the surface of the base substrate (11). A lower electrode (14), at least one part of which is formed at a remove from the base substrate (11), is formed on the surface of the dielectric layer (13). A piezoelectric layer (15) is formed on the surface of the lower electrode (14). An upper electrode (16) is formed on the surface of the piezoelectric layer (15). A moveable electrode is formed by at least one part of the upper electrode (16) or the lower electrode (14) being moved by distortion in the piezoelectric layer (15) caused by the application of piezoelectric voltage.

Inventors:
YAMAMOTO Kansho (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
山本観照 (〒55 京都府長岡京市東神足1丁目10番1号 株式会社 村田製作所内 Kyoto, 〒6178555, JP)
YAMAMOTO Teiji (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
Application Number:
JP2011/058697
Publication Date:
October 27, 2011
Filing Date:
April 06, 2011
Export Citation:
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Assignee:
Murata Manufacturing Co., Ltd. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
株式会社村田製作所 (〒55 京都府長岡京市東神足1丁目10番1号 Kyoto, 〒6178555, JP)
YAMAMOTO Kansho (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
山本観照 (〒55 京都府長岡京市東神足1丁目10番1号 株式会社 村田製作所内 Kyoto, 〒6178555, JP)
International Classes:
H01L41/09; B81B3/00; B81C1/00; H01L41/18; H01L41/22; H01L41/316; H01L41/331; H02N2/00; H01H57/00
Foreign References:
JP2009055683A2009-03-12
JP2008258186A2008-10-23
JP2008238330A2008-10-09
JP2007273800A2007-10-18
JP2009238546A2009-10-15
Other References:
See also references of EP 2562836A4
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (1-4-34, Noninbashi Chuo-ku, Osaka-sh, Osaka 11, 〒5400011, JP)
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Claims: