Title:
PIEZOELECTRIC ACTUATOR
Document Type and Number:
WIPO Patent Application WO/2022/085564
Kind Code:
A1
Abstract:
A piezoelectric actuator (1) is provided with a body portion (10) comprising stacked piezoelectric elements which are stacked in a Y-axis direction of an orthogonal coordinate system XYZ, the body portion (10) extending along a Z-axis direction. The body portion (10) includes a first piezoelectric element (11) for displacing a distal end portion (10a) in an X-axis direction, a second piezoelectric element (12) for displacing the distal end portion (10a) in the Y-axis direction, and a third piezoelectric element (13) for displacing the distal end portion (10a) in the Z-axis direction.
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Inventors:
SHIMODA TETSUYA (JP)
Application Number:
PCT/JP2021/038078
Publication Date:
April 28, 2022
Filing Date:
October 14, 2021
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L41/04; H01L41/047; H01L41/053; H01L41/083; H01L41/09; H01L41/187
Domestic Patent References:
| WO2008152820A1 | 2008-12-18 |
Foreign References:
| JPH1194865A | 1999-04-09 | |||
| JP2004531189A | 2004-10-07 | |||
| JP2015138083A | 2015-07-30 | |||
| JP2018125431A | 2018-08-09 | |||
| JP2004531189A | 2004-10-07 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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