Title:
PIEZOELECTRIC DEVICE AND METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/180340
Kind Code:
A1
Abstract:
Provided are: a piezoelectric device which is provided with a flexible plastic layer and has excellent piezoelectric properties, and in which cracking or fracture is suppressed; and a method for manufacturing the same. This piezoelectric device has stacked therein, at least a first electrode, a plastic layer, an orientation control layer, a piezoelectric layer, and a second electrode, wherein the orientation control layer is amorphous, the piezoelectric layer, which has a thickness of 20-250 nm and a wurtzite-type crystal structure, is formed on the orientation control layer, and the orientation control layer and the piezoelectric layer are disposed between the first electrode and the second electrode.
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Inventors:
ARIMOTO MASAHARU (JP)
MACHINAGA HIRONOBU (JP)
KATSUDA MASATO (JP)
KUROSE MANAMI (JP)
MACHINAGA HIRONOBU (JP)
KATSUDA MASATO (JP)
KUROSE MANAMI (JP)
Application Number:
PCT/JP2018/009015
Publication Date:
October 04, 2018
Filing Date:
March 08, 2018
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
H01L41/319; H01L41/047; H01L41/113; H01L41/187; H01L41/316
Domestic Patent References:
| WO2012005290A1 | 2012-01-12 | |||
| WO2015053345A1 | 2015-04-16 |
Foreign References:
| JP2005252069A | 2005-09-15 | |||
| JP2008211095A | 2008-09-11 | |||
| JP2006086142A | 2006-03-30 | |||
| JP2012160995A | 2012-08-23 | |||
| JP2011185681A | 2011-09-22 | |||
| JP2017065547A | 2017-03-29 |
Other References:
See also references of EP 3605627A4
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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