Title:
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2022/191192
Kind Code:
A1
Abstract:
A piezoelectric element comprising a support (10) and a vibration portion (20) disposed on the support (10), the vibration portion (20) including a support region (21a) supported on the support (10) and a plurality of vibration regions (22) having one end (221) side being supported on the support region (21a) and an other end (222) side opposite the one end (221) being floating above the support (10). The plurality of vibration regions (22) include: a vibration region (22) comprising a pressure-sensing portion (220a) of which the mass on the one end (221) side is greater than the mass on the other end (222) side, and which outputs a first sensing signal based on the charge of a piezoelectric film; and a vibration region (22) comprising an acceleration-sensing portion (220b) of which the mass on the other end (222) side is greater than the mass on the one end (221) side, and which outputs a second sensing signal based on the charge of the piezoelectric film (30).
Inventors:
SAKAI MINEKAZU (JP)
MAWATARI KAZUAKI (JP)
MAWATARI KAZUAKI (JP)
Application Number:
PCT/JP2022/010027
Publication Date:
September 15, 2022
Filing Date:
March 08, 2022
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
H04R1/24; H01L41/053; H01L41/113; H01L41/332; H04R17/02; H04R31/00
Foreign References:
| JP2020522178A | 2020-07-27 | |||
| JP2014515214A | 2014-06-26 | |||
| US20210051414A1 | 2021-02-18 | |||
| CN112423210A | 2021-02-26 | |||
| JP5936154B2 | 2016-06-15 |
Attorney, Agent or Firm:
YOU-I PATENT FIRM (JP)
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