Title:
PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO2001048834
Kind Code:
A3
Abstract:
The invention relates to a piezoelectric element, comprising at least one piezoceramic layer (1, 10, 21) that is located between electrodes (4, 5, 12, 13, 14, 16, 22, 23). An element of this type can be used as a sensor, an actuator or similar. In order to increase the life cycle of the piezoelectric element, in particular during use in a humid or chemically aggressive atmosphere, the piezoelectric element is coated (P) externally with parylene.
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Inventors:
HOFMANN HERBERT DI
RIEDEL MICHAEL (DE)
SCHMID ANDREAS JOSEPH (DE)
RIEDEL MICHAEL (DE)
SCHMID ANDREAS JOSEPH (DE)
Application Number:
PCT/DE2000/004622
Publication Date:
December 27, 2001
Filing Date:
December 22, 2000
Export Citation:
Assignee:
SIEMENS AG (DE)
HOFMANN RENATE (DE)
RIEDEL MICHAEL (DE)
SCHMID ANDREAS JOSEPH (DE)
HOFMANN RENATE (DE)
RIEDEL MICHAEL (DE)
SCHMID ANDREAS JOSEPH (DE)
International Classes:
H01L41/04; H01L41/053; H01L41/083; H01L41/09; (IPC1-7): H01L41/053; H01L41/083
Domestic Patent References:
WO1999025033A1 | 1999-05-20 | |||
WO1998037343A2 | 1998-08-27 |
Foreign References:
DE4036287A1 | 1991-05-23 | |||
DE19620826A1 | 1997-11-27 |
Other References:
THIAGARAJAN S ET AL: "Dual layer matching (20 MHz) piezoelectric transducers with glass and parylene", IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS AND FREQUENCY CONTROL, vol. 44, no. 5, September 1997 (1997-09-01), pages 1172 - 1174, XP000722417, ISSN: 0885-3010
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