Title:
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING PIEZOELECTRIC LAMINATE
Document Type and Number:
WIPO Patent Application WO/2022/172672
Kind Code:
A1
Abstract:
The present invention has: a substrate (1); a lower electrode film (2) provided on the substrate; a piezoelectric film (3) which is provided on the lower electrode film and has a plane area smaller than the plane area of the lower electrode film; an upper electrode film (4) provided on the piezoelectric film; and an insulating film (5) which is provided from the upper electrode film to the lower electrode film so as to cover at least a part of the side surface of the piezoelectric film, wherein a slope section (9a), which fills the step difference between the upper surface of the upper electrode film and the upper surface of the lower electrode film, is formed in the insulating film, and the slope section is formed in a shape that mitigates the step difference.
Inventors:
KURODA TOSHIAKI (JP)
SHIBATA KENJI (JP)
WATANABE KAZUTOSHI (JP)
KIMURA TAKESHI (JP)
SHIBATA KENJI (JP)
WATANABE KAZUTOSHI (JP)
KIMURA TAKESHI (JP)
Application Number:
PCT/JP2022/000632
Publication Date:
August 18, 2022
Filing Date:
January 12, 2022
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO (JP)
International Classes:
H01L41/047; H01L41/053; H01L41/09; H01L41/113; H01L41/187; H01L41/23; H01L41/29
Foreign References:
| EP3742506A1 | 2020-11-25 | |||
| JP2008159807A | 2008-07-10 | |||
| JP2008011483A | 2008-01-17 | |||
| JP2015220399A | 2015-12-07 | |||
| JP2018164039A | 2018-10-18 | |||
| US20200369029A1 | 2020-11-26 | |||
| JP2007184513A | 2007-07-19 | |||
| JP2008159807A | 2008-07-10 |
Attorney, Agent or Firm:
FUKUOKA Masahiro et al. (JP)
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