Title:
PIEZOELECTRIC TRANSDUCER
Document Type and Number:
WIPO Patent Application WO/2020/121609
Kind Code:
A1
Abstract:
Each of a plurality of beam portions (110) includes a fixed end part (111) and extends in a direction away from the fixed end part (111). A base part (120) is connected to the fixed end part (111) of each of the plurality of beam portions (110). Each of the plurality of beam portions (110) extends in the same plane. Among the plurality of beam portions (110), at least two beam portions (110) have mutually different extending directions (E). Each of the plurality of beam portions (110) includes a single crystalline piezoelectric body layer (10) having a polarization axis of the same direction, an upper electrode layer (20), and a lower electrode layer (30). A polarization axis (Z') has a polarization component in the plane. The axial direction of an orthogonal axis (X') orthogonal to the polarization axis (Z') and extending in the plane intersects the extending direction (E) of each of the plurality of beam portions (110).
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Inventors:
KUROKAWA FUMIYA (JP)
IKEUCHI SHINSUKE (JP)
MOCHIDA YOICHI (JP)
UMEZAWA SEIJI (JP)
ADACHI NOBUYOSHI (JP)
KISHIMOTO YUTAKA (JP)
IKEUCHI SHINSUKE (JP)
MOCHIDA YOICHI (JP)
UMEZAWA SEIJI (JP)
ADACHI NOBUYOSHI (JP)
KISHIMOTO YUTAKA (JP)
Application Number:
PCT/JP2019/034707
Publication Date:
June 18, 2020
Filing Date:
September 04, 2019
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L41/09; H01L41/053; H01L41/113; H01L41/187
Domestic Patent References:
| WO2017094520A1 | 2017-06-08 | |||
| WO2007060768A1 | 2007-05-31 |
Foreign References:
| JP2011004129A | 2011-01-06 | |||
| JP2011527152A | 2011-10-20 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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